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Silicon-on-Insulator Technology

Materials to VLSI

This book presents a complete and state-of-the-art review of SOI materials, devices and circuits. SOI fabrication and characterization techniques, SOI CMOS processing, and the physics of the SOI MOSFET receive an in-depth analysis.

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Silicon-on-Insulator Technology: Materials to VLSI

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Silicon-on-Insulator Technology: Materials to VLSI

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Length: 375 pages

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