Technology of Extreme Ultraviolet Radiation from edX

While not much time has passed since extreme ultraviolet radiation (EUV) might have been the most unknown range on the electromagnetic spectrum, it rapidly became the most important eneabler for the future of computing devices, starting with the smartphone, tablet, or laptop you currently use to read this text. In this course you will get to know EUV and its role in the semiconductor industry where EUV lithography is used to produce the smallest and most complex nanostructures used as integrated circuits. You will learn about the technological challenges that entailed the introduction of EUV into its current industrial application, from the search for a proper radiation source, the complexity of optical systems, and the necessity to put the whole system into vaccum tight chambers. Get fascinated by the sheer power of interdisciplinar research that allowed EUV technology to become one of the most important technologies of the 21st century and become part of our journey to push the limits of nanostructuring als well as nanometrology.

What you'll learn

- Working principle, componentes and technological challenges of industrial EUV technology
- Principle and technologies of EUV radiation generation
- Basic priciples of light propagation and optics
- Types and applications of EUV optical components
- Concept and technology of photolithography
- Concept and technology of EUV metrology

What's inside

Syllabus

Week 1: A comprehensive introduction to the motivation and basic principles for EUV technology with a deep dive into the basics of (EUV) optics.

Week 2: After introducing the basic principles of radiation generation and radiation properties, the major source types for EUV radiation are introduced including a discussion on their advantages for different applications.

Week 3: The basic principles of optics are introduced with emphasis on principles necessary to understand the major optical components used in EUV optics.

Week 4: The major optical components used in EUV optical systems are introduced including multilayer and grazing incidence mirrors, pinholes, transmission filters, Fresnel zone plates, and diffraction gratings.

Week 5: Basic principles and realization of photolithography is introduced regarding its history up to the the current EUV projection lithography systems with digressions to other EUV and nanolithography techniques.

Week 6: Basic optical metrological principles and the relevant technological realizations are introduced. The realization and application of spectrometry, reflectometry, scatterometry, and microscopy using EUV as probing radiation is discussed.

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Introduces the fundamentals of EUV technology, which is essential for modern electronics, including smartphones, tablets, and laptops

Taught by Prof. Carlo Holly, a recognized expert in EUV technology

Covers key aspects of EUV technology, from radiation generation to optics and photolithography

Emphasizes the interdisciplinary nature of EUV technology, highlighting its relevance to fields such as physics, engineering, and nanotechnology

Provides a comprehensive overview of EUV metrology techniques, which are crucial for quality control in semiconductor manufacturing

Assumes basic knowledge of optics and physics, which may require learners to have a foundation in these subjects

Career center

Learners who complete Technology of Extreme Ultraviolet Radiation will develop knowledge and skills that may be useful to these careers:

Optoelectronics Engineer

Optoelectronics Engineers design, develop, and test optoelectronic devices, such as lasers, LEDs, and photodetectors. This course's in-depth coverage of EUV optics, from the basics of light propagation to the types and applications of EUV optical components, may make it a helpful stepping stone for anyone seeking a career in optoelectronics engineering.

See salaries and explore the career path for Optoelectronics Engineer

Photonics Engineer

Photonics Engineers design, develop, and test photonic devices and systems. The in-depth coverage of EUV optics offered in this course may make it a good starting point for a career in photonics engineering.

See salaries and explore the career path for Photonics Engineer

Optical Engineer

Optical Engineers design and develop optical systems, including imaging systems, lasers, and fiber optics. With this course's focus on the principles of light propagation and optics, as well as the types and applications of EUV optical components, it may be helpful for those aspiring to be Optical Engineers.

See salaries and explore the career path for Optical Engineer

Semiconductor Device Engineer

Semiconductor Device Engineers design, develop, and test semiconductor devices, such as transistors and integrated circuits. Given that EUV lithography is used to produce the smallest and most complex nanostructures used as integrated circuits, this course may be helpful for aspiring Semiconductor Device Engineers.

See salaries and explore the career path for Semiconductor Device Engineer

Nanotechnology Engineer

Nanotechnology Engineers design, develop, and test nanotechnologies, which are technologies that use nanoscale materials and devices. Given its comprehensive overview of EUV technology, with a deep dive into the basics of EUV optics, this course may be useful for Nanotechnology Engineers.

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Radiation Physicist

Radiation Physicists use radiation to diagnose and treat diseases, as well as to conduct research. Given this course's coverage of the basic principles of radiation generation and radiation properties, it may be helpful for early career Radiation Physicists.

See salaries and explore the career path for Radiation Physicist

Nanosystems Engineer

Nanosystems Engineers design, develop, and test nanosystems, which are devices or systems that operate at the nanoscale. Given its comprehensive overview of EUV technology, with a deep dive into the basics of EUV optics, this course may be useful for Nanosystems Engineers.

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Solar Cell Engineer

Solar Cell Engineers design, develop, and test solar cells, which convert sunlight into electricity. With its coverage of the basic principles of light propagation and optics, as well as the types and applications of EUV optical components, this course may be a good starting point for a career in solar cell engineering.

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Laser Physicist

Laser Physicists research and develop lasers, which are devices that emit coherent light. While not a direct fit, this course's coverage of the basic principles of radiation generation and radiation properties may be of interest to Laser Physicists.

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Materials Scientist

Materials Scientists research and develop new materials, such as metals, ceramics, and plastics. While not a direct fit, this course's coverage of EUV optics, from the basics of light propagation to the types and applications of EUV optical components, may be of interest to Materials Scientists.

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Energy Engineer

Energy Engineers design, develop, and test energy systems, such as power plants and renewable energy systems. While not a direct fit, this course's coverage of the basic principles of radiation generation and radiation properties may be of interest to Energy Engineers.

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Quantum Computing Engineer

Quantum Computing Engineers design, develop, and test quantum computers, which are computers that use quantum-mechanical phenomena to perform calculations. While not a direct fit, this course's coverage of the basic principles of radiation generation and radiation properties may be of interest to Quantum Computing Engineers.

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Nuclear Engineer

Nuclear Engineers design, build, and operate nuclear reactors. Because working with radiation is their bread and butter, a background in EUV radiation, such as what is offered in this course, may be helpful.

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Environmental Engineer

Environmental Engineers design, develop, and test environmental systems, such as water treatment plants and air pollution control systems. While not a direct fit, this course's coverage of the basic principles of radiation generation and radiation properties may be of interest to Environmental Engineers.

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Mechanical Engineer

Mechanical Engineers design, develop, and test mechanical systems, such as engines, machines, and robots. While not a direct fit, this course's coverage of the basic principles of radiation generation and radiation properties may be of interest to Mechanical Engineers.

See salaries and explore the career path for Mechanical Engineer

Technology of Extreme Ultraviolet Radiation

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