While not much time has passed since extreme ultraviolet radiation (EUV) might have been the most unknown range on the electromagnetic spectrum, it rapidly became the most important eneabler for the future of computing devices, starting with the smartphone, tablet, or laptop you currently use to read this text. In this course you will get to know EUV and its role in the semiconductor industry where EUV lithography is used to produce the smallest and most complex nanostructures used as integrated circuits. You will learn about the technological challenges that entailed the introduction of EUV into its current industrial application, from the search for a proper radiation source, the complexity of optical systems, and the necessity to put the whole system into vaccum tight chambers. Get fascinated by the sheer power of interdisciplinar research that allowed EUV technology to become one of the most important technologies of the 21st century and become part of our journey to push the limits of nanostructuring als well as nanometrology.
While not much time has passed since extreme ultraviolet radiation (EUV) might have been the most unknown range on the electromagnetic spectrum, it rapidly became the most important eneabler for the future of computing devices, starting with the smartphone, tablet, or laptop you currently use to read this text. In this course you will get to know EUV and its role in the semiconductor industry where EUV lithography is used to produce the smallest and most complex nanostructures used as integrated circuits. You will learn about the technological challenges that entailed the introduction of EUV into its current industrial application, from the search for a proper radiation source, the complexity of optical systems, and the necessity to put the whole system into vaccum tight chambers. Get fascinated by the sheer power of interdisciplinar research that allowed EUV technology to become one of the most important technologies of the 21st century and become part of our journey to push the limits of nanostructuring als well as nanometrology.
- Working principle, componentes and technological challenges of industrial EUV technology
- Principle and technologies of EUV radiation generation
- Basic priciples of light propagation and optics
- Types and applications of EUV optical components
- Concept and technology of photolithography
- Concept and technology of EUV metrology
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