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Univ.-Prof. Carlo Holly
While not much time has passed since extreme ultraviolet radiation (EUV) might have been the most unknown range on the electromagnetic spectrum, it rapidly became the most important eneabler for the future of computing devices, starting with the smartphone, tablet, or laptop you currently use to read this text. In this course you will get to know EUV and its role in the semiconductor industry where EUV lithography is used to produce the smallest and most complex nanostructures used as integrated circuits. You will learn about the technological challenges that entailed the introduction of EUV into its current industrial application, from the search for a proper radiation source, the complexity of optical systems, and the necessity to put the whole system into vaccum tight chambers. Get fascinated by the sheer power of interdisciplinar research that allowed EUV technology to become one of the most important technologies of the 21st century and become part of our journey to push the limits of nanostructuring als well as nanometrology.
Read more
While not much time has passed since extreme ultraviolet radiation (EUV) might have been the most unknown range on the electromagnetic spectrum, it rapidly became the most important eneabler for the future of computing devices, starting with the smartphone, tablet, or laptop you currently use to read this text. In this course you will get to know EUV and its role in the semiconductor industry where EUV lithography is used to produce the smallest and most complex nanostructures used as integrated circuits. You will learn about the technological challenges that entailed the introduction of EUV into its current industrial application, from the search for a proper radiation source, the complexity of optical systems, and the necessity to put the whole system into vaccum tight chambers. Get fascinated by the sheer power of interdisciplinar research that allowed EUV technology to become one of the most important technologies of the 21st century and become part of our journey to push the limits of nanostructuring als well as nanometrology.
Read more
While not much time has passed since extreme ultraviolet radiation (EUV) might have been the most unknown range on the electromagnetic spectrum, it rapidly became the most important eneabler for the future of computing devices, starting with the smartphone, tablet, or laptop you currently use to read this text. In this course you will get to know EUV and its role in the semiconductor industry where EUV lithography is used to produce the smallest and most complex nanostructures used as integrated circuits. You will learn about the technological challenges that entailed the introduction of EUV into its current industrial application, from the search for a proper radiation source, the complexity of optical systems, and the necessity to put the whole system into vaccum tight chambers. Get fascinated by the sheer power of interdisciplinar research that allowed EUV technology to become one of the most important technologies of the 21st century and become part of our journey to push the limits of nanostructuring als well as nanometrology.
What you'll learn
- Working principle, componentes and technological challenges of industrial EUV technology
- Principle and technologies of EUV radiation generation
- Basic priciples of light propagation and optics
- Types and applications of EUV optical components
- Concept and technology of photolithography
- Concept and technology of EUV metrology
Register for this course and see more details by visiting:
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What's inside
Syllabus
Week 1: A comprehensive introduction to the motivation and basic principles for EUV technology with a deep dive into the
basics of (EUV) optics.
Read more
Syllabus
Week 1: A comprehensive introduction to the motivation and basic principles for EUV technology with a deep dive into the
basics of (EUV) optics.
Read more
Week 2: After introducing the basic principles of radiation generation and radiation properties, the major source types for EUV radiation are introduced including a discussion on their advantages for different applications.
Week 3: The basic principles of optics are introduced with emphasis on principles necessary to understand the major optical components used in EUV optics.
Week 4: The major optical components used in EUV optical systems are introduced including multilayer and grazing incidence mirrors, pinholes, transmission filters, Fresnel zone plates, and diffraction gratings.
Week 5: Basic principles and realization of photolithography is introduced regarding its history up to the the current EUV projection lithography systems with digressions to other EUV and nanolithography techniques.
Week 6: Basic optical metrological principles and the relevant technological realizations are introduced. The realization and application of spectrometry, reflectometry, scatterometry, and microscopy using EUV as probing radiation is discussed.
Good to know
Good to know
Know what's good ,
what to watch for , and
possible dealbreakers
Introduces the fundamentals of EUV technology, which is essential for modern electronics, including smartphones, tablets, and laptops
Taught by Prof. Carlo Holly, a recognized expert in EUV technology
Covers key aspects of EUV technology, from radiation generation to optics and photolithography
Emphasizes the interdisciplinary nature of EUV technology, highlighting its relevance to fields such as physics, engineering, and nanotechnology
Provides a comprehensive overview of EUV metrology techniques, which are crucial for quality control in semiconductor manufacturing
Assumes basic knowledge of optics and physics, which may require learners to have a foundation in these subjects
Save this course
Save Technology of Extreme Ultraviolet Radiation to your list so you can find it easily later:
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Activities
Be better prepared
before
your course. Deepen your understanding
during
and
after
it. Supplement your coursework and achieve mastery of the topics covered
in Technology of Extreme Ultraviolet Radiation with these
activities:
Consolidate and review course materials
Show steps
Taking time to thoroughly review all the materials for the course will greatly improve retention and overall understanding of the EUV technology ecosystem.
Show steps
-
Review lecture notes, textbook chapters, and other provided materials.
-
Organize and summarize the key concepts and ideas.
-
Identify areas where further review is needed.
Compile and review course materials
Show steps
Start the course off on the right foot by gathering together all your course materials and reviewing previous knowledge.
Show steps
-
Gather all the relevant textbooks, references, and research papers you'll use throughout the course
-
If you have spare time, read the syllabus in advance so you know what topics to expect
-
Begin compiling a notebook to keep all your notes, assignments, and materials in one location
-
Review any relevant materials you've covered before at other universities.
-
Ask the instructor for access to additional resources that might supplement your learning
Review basic optics principles
Show steps
Reviewing basic optics principles will provide a solid foundation for understanding EUV technology.
Browse courses on
Optics
Show steps
-
Review the concepts of light propagation, reflection, and refraction.
-
Understand the principles of interference and diffraction.
-
Study the properties of different optical materials.
Six other activities
Expand to see all activities and additional details
Show all nine activities
Participate in group discussions on EUV technology
Show steps
Participating in group discussions on EUV technology will allow you to exchange ideas and learn from others.
Show steps
-
Join a study group or online forum focused on EUV technology.
-
Engage in discussions on various topics related to EUV technology.
-
Share your knowledge and insights with others.
Solve problems on EUV optics
Show steps
Practice drills on EUV optics will help reinforce the concepts learned in the course.
Show steps
-
Find practice problems on EUV optics.
-
Solve the problems using the principles learned in the course.
-
Review the solutions to identify areas for improvement.
Develop a presentation on EUV lithography
Show steps
Creating a presentation on EUV lithography will allow you to synthesize your understanding of the technology and its applications.
Show steps
-
Gather information on EUV lithography from various sources.
-
Organize the information into a logical flow.
-
Create visual aids to support your presentation.
-
Practice delivering your presentation.
Build a repository of resources on EUV technology
Show steps
Building a repository of resources on EUV technology will provide a valuable reference for your future studies and career.
Show steps
-
Gather articles, whitepapers, and other relevant materials on EUV technology.
-
Organize the resources into a logical structure.
-
Create a database or online repository to store the resources.
Assist with research or development projects involving EUV technology
Show steps
Volunteering with research or development projects involving EUV technology will provide practical experience and deepen your understanding of the field.
Show steps
-
Identify research labs or companies working on EUV technology.
-
Contact the researchers or engineers involved.
-
Inquire about volunteer opportunities.
Connect with professionals in the field of EUV technology
Show steps
Connecting with professionals working in the field of EUV technology can provide valuable insights, career advice, and opportunities.
Show steps
-
Attend industry events and conferences.
-
Reach out to researchers and engineers via LinkedIn or email.
-
Seek mentorship opportunities through professional organizations.
Consolidate and review course materials
Show steps
Taking time to thoroughly review all the materials for the course will greatly improve retention and overall understanding of the EUV technology ecosystem.
Show steps
Show steps
Show steps
- Review lecture notes, textbook chapters, and other provided materials.
- Organize and summarize the key concepts and ideas.
- Identify areas where further review is needed.
Compile and review course materials
Show steps
Start the course off on the right foot by gathering together all your course materials and reviewing previous knowledge.
Show steps
Show steps
Show steps
- Gather all the relevant textbooks, references, and research papers you'll use throughout the course
- If you have spare time, read the syllabus in advance so you know what topics to expect
- Begin compiling a notebook to keep all your notes, assignments, and materials in one location
- Review any relevant materials you've covered before at other universities.
- Ask the instructor for access to additional resources that might supplement your learning
Review basic optics principles
Show steps
Reviewing basic optics principles will provide a solid foundation for understanding EUV technology.
Browse courses on
Optics
Show steps
Show steps
Show steps
- Review the concepts of light propagation, reflection, and refraction.
- Understand the principles of interference and diffraction.
- Study the properties of different optical materials.
Six other activities
Expand to see all activities and additional details
Show all nine activities
Participate in group discussions on EUV technology
Show steps
Participating in group discussions on EUV technology will allow you to exchange ideas and learn from others.
Show steps
Show steps
Show steps
- Join a study group or online forum focused on EUV technology.
- Engage in discussions on various topics related to EUV technology.
- Share your knowledge and insights with others.
Solve problems on EUV optics
Show steps
Practice drills on EUV optics will help reinforce the concepts learned in the course.
Show steps
Show steps
Show steps
- Find practice problems on EUV optics.
- Solve the problems using the principles learned in the course.
- Review the solutions to identify areas for improvement.
Develop a presentation on EUV lithography
Show steps
Creating a presentation on EUV lithography will allow you to synthesize your understanding of the technology and its applications.
Show steps
Show steps
Show steps
- Gather information on EUV lithography from various sources.
- Organize the information into a logical flow.
- Create visual aids to support your presentation.
- Practice delivering your presentation.
Build a repository of resources on EUV technology
Show steps
Building a repository of resources on EUV technology will provide a valuable reference for your future studies and career.
Show steps
Show steps
Show steps
- Gather articles, whitepapers, and other relevant materials on EUV technology.
- Organize the resources into a logical structure.
- Create a database or online repository to store the resources.
Assist with research or development projects involving EUV technology
Show steps
Volunteering with research or development projects involving EUV technology will provide practical experience and deepen your understanding of the field.
Show steps
Show steps
Show steps
- Identify research labs or companies working on EUV technology.
- Contact the researchers or engineers involved.
- Inquire about volunteer opportunities.
Connect with professionals in the field of EUV technology
Show steps
Connecting with professionals working in the field of EUV technology can provide valuable insights, career advice, and opportunities.
Show steps
Show steps
Show steps
- Attend industry events and conferences.
- Reach out to researchers and engineers via LinkedIn or email.
- Seek mentorship opportunities through professional organizations.
Career center
Learners who complete Technology of Extreme Ultraviolet Radiation will develop knowledge and skills
that may be useful to these careers:
Optoelectronics Engineer
Optoelectronics Engineer
Optoelectronics Engineers design, develop, and test optoelectronic devices, such as lasers, LEDs, and photodetectors. This course's in-depth coverage of EUV optics, from the basics of light propagation to the types and applications of EUV optical components, may make it a helpful stepping stone for anyone seeking a career in optoelectronics engineering.
Photonics Engineer
Photonics Engineer
Photonics Engineers design, develop, and test photonic devices and systems. The in-depth coverage of EUV optics offered in this course may make it a good starting point for a career in photonics engineering.
Optical Engineer
Optical Engineer
Optical Engineers design and develop optical systems, including imaging systems, lasers, and fiber optics. With this course's focus on the principles of light propagation and optics, as well as the types and applications of EUV optical components, it may be helpful for those aspiring to be Optical Engineers.
Semiconductor Device Engineer
Semiconductor Device Engineer
Semiconductor Device Engineers design, develop, and test semiconductor devices, such as transistors and integrated circuits. Given that EUV lithography is used to produce the smallest and most complex nanostructures used as integrated circuits, this course may be helpful for aspiring Semiconductor Device Engineers.
Nanotechnology Engineer
Nanotechnology Engineer
Nanotechnology Engineers design, develop, and test nanotechnologies, which are technologies that use nanoscale materials and devices. Given its comprehensive overview of EUV technology, with a deep dive into the basics of EUV optics, this course may be useful for Nanotechnology Engineers.
Radiation Physicist
Radiation Physicist
Radiation Physicists use radiation to diagnose and treat diseases, as well as to conduct research. Given this course's coverage of the basic principles of radiation generation and radiation properties, it may be helpful for early career Radiation Physicists.
Nanosystems Engineer
Nanosystems Engineer
Nanosystems Engineers design, develop, and test nanosystems, which are devices or systems that operate at the nanoscale. Given its comprehensive overview of EUV technology, with a deep dive into the basics of EUV optics, this course may be useful for Nanosystems Engineers.
Solar Cell Engineer
Solar Cell Engineer
Solar Cell Engineers design, develop, and test solar cells, which convert sunlight into electricity. With its coverage of the basic principles of light propagation and optics, as well as the types and applications of EUV optical components, this course may be a good starting point for a career in solar cell engineering.
Laser Physicist
Laser Physicist
Laser Physicists research and develop lasers, which are devices that emit coherent light. While not a direct fit, this course's coverage of the basic principles of radiation generation and radiation properties may be of interest to Laser Physicists.
Materials Scientist
Materials Scientist
Materials Scientists research and develop new materials, such as metals, ceramics, and plastics. While not a direct fit, this course's coverage of EUV optics, from the basics of light propagation to the types and applications of EUV optical components, may be of interest to Materials Scientists.
Energy Engineer
Energy Engineer
Energy Engineers design, develop, and test energy systems, such as power plants and renewable energy systems. While not a direct fit, this course's coverage of the basic principles of radiation generation and radiation properties may be of interest to Energy Engineers.
Quantum Computing Engineer
Quantum Computing Engineer
Quantum Computing Engineers design, develop, and test quantum computers, which are computers that use quantum-mechanical phenomena to perform calculations. While not a direct fit, this course's coverage of the basic principles of radiation generation and radiation properties may be of interest to Quantum Computing Engineers.
Nuclear Engineer
Nuclear Engineer
Nuclear Engineers design, build, and operate nuclear reactors. Because working with radiation is their bread and butter, a background in EUV radiation, such as what is offered in this course, may be helpful.
Environmental Engineer
Environmental Engineer
Environmental Engineers design, develop, and test environmental systems, such as water treatment plants and air pollution control systems. While not a direct fit, this course's coverage of the basic principles of radiation generation and radiation properties may be of interest to Environmental Engineers.
Mechanical Engineer
Mechanical Engineer
Mechanical Engineers design, develop, and test mechanical systems, such as engines, machines, and robots. While not a direct fit, this course's coverage of the basic principles of radiation generation and radiation properties may be of interest to Mechanical Engineers.
For more career information including salaries, visit:
OpenCourser.com/course/9krzjt/technology
Reading list
We've selected seven books
that we think will supplement your
learning. Use these to
develop background knowledge, enrich your coursework, and gain a
deeper understanding of the topics covered in
Technology of Extreme Ultraviolet Radiation.
Extreme Ultraviolet Radiation: Generation and Applications comprehensive overview of the generation and applications of extreme ultraviolet (EUV) radiation.
Handbook of Optics: Volume III, Vision and Color comprehensive overview of the field of vision and color.
Photonics: Principles and Practices provides a comprehensive overview of the field of photonics.
Save
Quantum Optics: Theory and Applications provides a comprehensive overview of the field of quantum optics.
Radiation Detection and Measurement provides a comprehensive overview of the field of radiation detection and measurement.
Semiconductor Physics and Devices: Basic Principles provides a comprehensive overview of the field of semiconductor physics and devices.
Save
Solid-State Theory provides a comprehensive overview of the field of solid-state theory.
For more information about how these books relate to this course, visit:
OpenCourser.com/course/9krzjt/technology
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Effort
4 to 6 hours per week for 6 weeks
Level
Introductory
Via
edX
Institution
RWTH Aachen University
Instructor
Univ.-Prof. Carlo Holly
Session
May 15, 2024
- July 3, 2024
Language
English
Transcript
English
Good to know
Introduces the fundamentals of EUV technology, which is essential for modern electronics, including smartphones, tablets, and laptops
Taught by Prof. Carlo Holly, a recognized expert in EUV technology
Covers key aspects of EUV technology, from radiation generation to optics and photolithography
Emphasizes the interdisciplinary nature of EUV technology, highlighting its relevance to fields such as physics, engineering, and nanotechnology
Provides a comprehensive overview of EUV metrology techniques, which are crucial for quality control in semiconductor manufacturing
Assumes basic knowledge of optics and physics, which may require learners to have a foundation in these subjects
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