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Find a path to becoming a MEMS. Learn more at:
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Reading list
We've selected 13 books
that we think will supplement your
learning. Use these to
develop background knowledge, enrich your coursework, and gain a
deeper understanding of the topics covered in
MEMS.
This classic textbook provides a rigorous treatment of the fundamental principles of microsystem design, covering topics such as materials, fabrication, and modeling.
Is considered a standard reference in the field of microfabrication and provides comprehensive coverage of the fundamentals of the subject, ranging from materials science to process technologies.
Covers the use of MEMS in RF applications, including antennas, filters, and tuners.
Provides a comprehensive overview of MEMS design and manufacturing. It covers a wide range of topics, including MEMS materials, fabrication processes, and packaging. It also includes case studies of MEMS devices used in various applications.
Covers the use of MEMS in actuators and motors, including electrostatic actuators, thermal actuators, and piezoelectric actuators.
This introductory book provides a comprehensive overview of the principles and processes involved in microfabrication, making it suitable for both undergraduate and graduate students.
Provides a comprehensive overview of MEMS technology. It covers a wide range of topics, including MEMS design, fabrication, and testing. It also includes case studies of MEMS devices used in various applications.
Provides a comprehensive overview of micromachined transducers. It covers a wide range of topics, including MEMS design, fabrication, and testing. It also includes case studies of MEMS devices used in various applications.
Provides a comprehensive overview of MEMS design, manufacture, and applications. It covers a wide range of topics, including MEMS materials, fabrication processes, and packaging. It also includes case studies of MEMS devices used in various applications.
For more information about how these books relate to this course, visit:
OpenCourser.com/topic/fq8d5b/mem
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