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MEMS

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Coming soon We're preparing course recommendations and better information about MEMS. Check back soon for more details.

Path to MEMS

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We've curated one courses to help you on your path to MEMS. Use these to develop your skills, build background knowledge, and put what you learn to practice.
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Reading list

We've selected 13 books that we think will supplement your learning. Use these to develop background knowledge, enrich your coursework, and gain a deeper understanding of the topics covered in MEMS.
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Transition and Turbulence Control
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This comprehensive handbook covers a wide range of MEMS topics, including materials, design, fabrication, and testing. It valuable resource for researchers and practitioners alike.
Transition and Turbulence Control
Paperback
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Transition and Turbulence Control
Kindle Edition
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Fundamentals of Microfabrication and Nanotechnology...
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Is considered a standard reference in the field of microfabrication and provides comprehensive coverage of the fundamentals of the subject, ranging from materials science to process technologies.
Fundamentals of Microfabrication and Nanotechnology...
Hardcover
$$$$
Fundamentals of Microfabrication and Nanotechnology...
Hardcover
$$$$
Fundamentals of Microfabrication and Nanotechnology...
Kindle Edition
$$$$
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Microsystem Design
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This classic textbook provides a rigorous treatment of the fundamental principles of microsystem design, covering topics such as materials, fabrication, and modeling.
Microsystem Design
Hardcover
$$$$
Microsystem Design
Kindle Edition
$$$
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MEMS Mechanical Sensors
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Provides a comprehensive overview of MEMS sensors, covering their principles, design, fabrication, and applications in various fields.
MEMS Mechanical Sensors
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MEMS Mechanical Sensors
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RF MEMS and Their Applications
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Covers the use of MEMS in RF applications, including antennas, filters, and tuners.
RF MEMS and Their Applications
Kindle Edition
$$$$
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Smart Material Systems and MEMS
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Covers the use of MEMS in actuators and motors, including electrostatic actuators, thermal actuators, and piezoelectric actuators.
Smart Material Systems and Mems: Design and...
Paperback
$$
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Fundamentals of Microfabrication
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This introductory book provides a comprehensive overview of the principles and processes involved in microfabrication, making it suitable for both undergraduate and graduate students.
Fundamentals of Microfabrication and Nanotechnology...
Hardcover
$$$$
Fundamentals of Microfabrication: The Science of...
Hardcover
$$$
From MEMS to Bio-MEMS and Bio-NEMS: Manufacturing...
Hardcover
$$$
Fundamentals of Microfabrication and Nanotechnology...
Hardcover
$$$
Fundamentals of Microfabrication
Hardcover
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Fundamentals of Microfabrication **ISBN:...
Hardcover
$$$$
Fundamentals of Microfabrication and Nanotechnology...
Hardcover
$$$$
Fundamentals of Microfabrication and Nanotechnology...
Kindle Edition
$$$$
From MEMS to Bio-MEMS and Bio-NEMS: Manufacturing...
Kindle Edition
$$$$
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MEMS and Microsystems
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Provides a comprehensive overview of MEMS design and manufacturing. It covers a wide range of topics, including MEMS materials, fabrication processes, and packaging. It also includes case studies of MEMS devices used in various applications.
MEMS and Microsystems: Design, Manufacture, and...
Hardcover
$$$$
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An Introduction to Microelectromechanical Systems...
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Provides a comprehensive overview of MEMS technology. It covers a wide range of topics, including MEMS design, fabrication, and testing. It also includes case studies of MEMS devices used in various applications.
An Introduction to Microelectromechanical Systems...
Hardcover
$$$
An Introduction to Microelectromechanical Systems...
Kindle Edition
$$$
Micromachined Transducers Sourcebook
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Provides a comprehensive overview of micromachined transducers. It covers a wide range of topics, including MEMS design, fabrication, and testing. It also includes case studies of MEMS devices used in various applications.
Micromachined Transducers Sourcebook
Hardcover
$$$$
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Engineering and Scientific Computations Using MATLAB
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Provides a comprehensive overview of MEMS design, manufacture, and applications. It covers a wide range of topics, including MEMS materials, fabrication processes, and packaging. It also includes case studies of MEMS devices used in various applications.
Engineering and Scientific Computations Using MATLAB
Hardcover
$$$$
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Introduction to Intelligence
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Provides an introduction to MEMS for those who are new to the field. It covers a wide range of topics, including MEMS design, fabrication, and testing. It also includes case studies of MEMS devices used in various applications.
Introduction to Intelligence
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Introduction to Intelligence
Kindle Edition
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Samuel J. Smith
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Provides a history of MEMS technology. It covers a wide range of topics, including MEMS design, fabrication, and testing. It also includes case studies of MEMS devices used in various applications.
Samuel J. Smith
Paperback
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Samuel J. Smith
Kindle Edition
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