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MEMS

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Path to MEMS

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Reading list

We've selected 13 books that we think will supplement your learning. Use these to develop background knowledge, enrich your coursework, and gain a deeper understanding of the topics covered in MEMS.
This comprehensive handbook covers a wide range of MEMS topics, including materials, design, fabrication, and testing. It valuable resource for researchers and practitioners alike.
Is considered a standard reference in the field of microfabrication and provides comprehensive coverage of the fundamentals of the subject, ranging from materials science to process technologies.
This classic textbook provides a rigorous treatment of the fundamental principles of microsystem design, covering topics such as materials, fabrication, and modeling.
Provides a comprehensive overview of MEMS sensors, covering their principles, design, fabrication, and applications in various fields.
Covers the use of MEMS in RF applications, including antennas, filters, and tuners.
Covers the use of MEMS in actuators and motors, including electrostatic actuators, thermal actuators, and piezoelectric actuators.
Provides a comprehensive overview of MEMS design and manufacturing. It covers a wide range of topics, including MEMS materials, fabrication processes, and packaging. It also includes case studies of MEMS devices used in various applications.
Provides a comprehensive overview of MEMS technology. It covers a wide range of topics, including MEMS design, fabrication, and testing. It also includes case studies of MEMS devices used in various applications.
Provides a comprehensive overview of micromachined transducers. It covers a wide range of topics, including MEMS design, fabrication, and testing. It also includes case studies of MEMS devices used in various applications.
Provides a comprehensive overview of MEMS design, manufacture, and applications. It covers a wide range of topics, including MEMS materials, fabrication processes, and packaging. It also includes case studies of MEMS devices used in various applications.
Provides an introduction to MEMS for those who are new to the field. It covers a wide range of topics, including MEMS design, fabrication, and testing. It also includes case studies of MEMS devices used in various applications.
Provides a history of MEMS technology. It covers a wide range of topics, including MEMS design, fabrication, and testing. It also includes case studies of MEMS devices used in various applications.
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