Micro and Nanofabrication (MEMS)

Week 1: MEMS and cleanroom introductionThis module introduces the basics of electromechanical systems (MEMS) and cleanroom fabrication. Week 2: Chemical vapor deposition (CVD)This module on chemical vapor deposition or CVD describes in detail basic principles of CVD and will show you the cleanroom infrastructure that is used to run a CVD process. Week 3: Physical vapor deposition (PVD)This module on physical vapor deposition describes in details the two main PVD methods; thermal evaporation and sputtering. Week 4: LithographyThis module on lithography describes in details the two main resist patterning methods: optical and electron beam lithography. Week 5: Dry etchingThis module on dry etching describes etching in a gas environment. We will introduce etching directionality and anisotropy and give a few simple rules for choosing dry etching processes for specific materials in a plasma reactor and provide theoretical concepts that characterize a plasma in a dry etching equipment. Week 6: Wet etchingThis module on wet etching describes etching in a liquid environment. We will introduce anisotropic wet etching of silicon substrates, where certain lattice planes are etched and others not, isotropic etching of silicon, and finally thin membrane microfabrication techniques using wet etching. Week 7: Inspection and metrologyThis module describes methods of inspection and metrology based on four technique categories: optical, mechanical, charged beam and electrical.