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Electron and Ion Beam Characterization

Trevor Thornton

Electron and ion beams are widely used for both qualitative and quantitative analysis of semiconductor materials and devices. They can be used to image structures with sub-nm resolution and to provide information about elemental composition and dopant concentration. This course describes the fundamentals of electron and ion beam characterization and includes a project that analyzes the surface roughness of a solar cell.

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What's inside

Syllabus

Course Introduction
Electron and ion beams are widely used for both qualitative and quantitative analysis of semiconductor materials and devices. They can be used to image structures with sub-nm resolution and to provide information about elemental composition and dopant concentration. This course describes the fundamentals of electron and ion beam characterization and includes a project that analyzes the surface roughness of a solar cell.
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Week 4.1: Scanning Electron Microscopy
This week introduces the concepts of scanning electron microscopy and how it is used for both qualitative and quantitative sample analysis.
Week 4.2: Auger Electron Spectroscopy
This week, you will learn about Auger electron emission spectroscopy, a powerful technique for surface analysis.
Week 4.3: Secondary Ion Mass Spectroscopy
This week, you will learn about secondary ion mass spectroscopy and how it is used to measure the concentration and distribution of constituent materials in semiconductors.
Week 4.4: Course Wrap-up and Project
This week, you will complete a case study to assess your ability to use images obtained from an SEM for quantitative surface analysis.

Good to know

Know what's good
, what to watch for
, and possible dealbreakers
Introduces practices used across industries that analyze semiconductors
Builds foundational knowledge for beginners and reinforces concepts for intermediate learners
Taught by Trevor Thornton, who has a strong reputation in this segment of semiconductor analysis
Has a project that allows learners to apply their learning to a practical example

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Activities

Be better prepared before your course. Deepen your understanding during and after it. Supplement your coursework and achieve mastery of the topics covered in Electron and Ion Beam Characterization with these activities:
Organize and review your notes and materials
Enhance your understanding by reviewing and synthesizing your learning materials.
Show steps
  • Gather all your notes, assignments, quizzes, and exams
  • Review the materials and identify areas where you need further clarification
  • Organize your materials into a logical structure, such as folders or a digital notebook
Follow a tutorial on secondary ion mass spectroscopy (SIMS)
Expand your knowledge of SIMS and its applications in semiconductor characterization.
Show steps
  • Find a reputable online tutorial or course on SIMS
  • Complete the tutorial, paying special attention to the principles and applications of SIMS
Attend a conference or workshop on electron and ion beam characterization
Connect with experts and learn about the latest advancements in the field.
Browse courses on Materials Science
Show steps
  • Identify relevant conferences or workshops in your area or online
  • Register for the event and make arrangements for travel and accommodation
  • Attend sessions, network with attendees, and gather information
Five other activities
Expand to see all activities and additional details
Show all eight activities
Solve practice problems related to electron and ion beam characterization
Strengthen your problem-solving skills and reinforce your understanding of the course concepts.
Browse courses on Materials Science
Show steps
  • Find practice problems in textbooks, online resources, or past exams
  • Attempt to solve the problems independently, using the course materials for reference
  • Check your answers and identify areas where you need further clarification
Practice Auger electron spectroscopy exercises
Reinforce your understanding of Auger electron spectroscopy through hands-on practice.
Show steps
  • Set up an Auger electron spectrometer (AES) simulation or use an online tool
  • Select a sample of interest and run an AES analysis
  • Identify the peaks in the Auger spectrum and interpret the results
Develop a presentation on electron beam characterization techniques
Demonstrate your understanding of electron beam characterization by creating a comprehensive presentation.
Show steps
  • Research different electron beam characterization techniques and select a specific topic
  • Gather relevant information and create a presentation outline
  • Develop visual aids, such as charts, graphs, and images
  • Practice your presentation and get feedback from peers or instructors
Create a video tutorial on scanning electron microscopy (SEM)
Solidify your knowledge of SEM by creating a teaching resource for others.
Show steps
  • Plan the content of your tutorial, including the key concepts and techniques
  • Write a script or outline for your video
  • Record and edit your video, ensuring clarity and engaging visuals
  • Publish your tutorial on a platform like YouTube or Vimeo
Build a project that utilizes electron and ion beam characterization
Apply your knowledge to a practical project and gain hands-on experience.
Browse courses on Materials Engineering
Show steps
  • Define the scope and objectives of your project
  • Design and plan the methodology for utilizing electron and ion beam characterization techniques
  • Conduct the characterization experiments and collect data
  • Analyze the data and draw conclusions about the materials or devices under investigation

Career center

Learners who complete Electron and Ion Beam Characterization will develop knowledge and skills that may be useful to these careers:
Semiconductor Device Engineer
A Semiconductor Device Engineer usually needs at least a Bachelor's degree in Electrical Engineering or a related field. This course may be useful for someone aiming to work in this field, as it covers the fundamentals of electron and ion beam characterization of semiconductor materials and devices. This knowledge can help a Semiconductor Device Engineer with qualitative and quantitative analysis of semiconductor materials and devices, which is important for this role.
Materials Scientist
A Materials Scientist typically needs at least a Master's degree in Materials Science, Materials Engineering, or a related field. This course may be useful for someone aiming to work in this field, as it covers the fundamentals of electron and ion beam characterization of semiconductor materials and devices. This knowledge can help a Materials Scientist with qualitative and quantitative analysis of semiconductor materials and devices, which is important for this role.
Process Engineer
A Process Engineer typically needs a Master's degree in a field like Chemical Engineering or Materials Science. This course may be useful for someone aiming to work in this field, as it covers the fundamentals of electron and ion beam characterization of semiconductor materials and devices. This knowledge can help a Process Engineer with fabricating and testing semiconductor devices, which is important for this role.
Microfabrication Engineer
A Microfabrication Engineer typically needs a Bachelor's degree in a related field. This course may be useful for someone aiming to work in this field, as it covers the fundamentals of electron and ion beam characterization of semiconductor materials and devices. This knowledge can help a Microfabrication Engineer with designing and fabricating microelectronic devices, which is important for this role.
Nanotechnology Engineer
A Nanotechnology Engineer typically needs at least a Master's degree in a related field. This course may be useful for someone aiming to work in this field, as it covers the fundamentals of electron and ion beam characterization of semiconductor materials and devices. This knowledge can help a Nanotechnology Engineer with designing and fabricating nanometer-scale devices, which is important for this role.
Renewable Energy Engineer
A Renewable Energy Engineer typically needs a Bachelor's degree in a related field. This course may be useful for someone aiming to work in this field, as it includes a project that analyzes the surface roughness of a solar cell. This knowledge can help a Renewable Energy Engineer with designing and testing solar cells, which is important for this role.
Analytical Chemist
An Analytical Chemist typically needs at least a Bachelor's degree in Chemistry or a related field. This course may be useful for someone aiming to work in this field, as it covers the fundamentals of electron and ion beam characterization of materials. This knowledge can help an Analytical Chemist with characterizing the composition and structure of materials, which is important for this role.
Research Scientist
A Research Scientist typically needs at least a PhD in a related field. This course may be useful for someone aiming to work in this field, as it covers the fundamentals of electron and ion beam characterization of semiconductor materials and devices. This knowledge can help a Research Scientist with researching and developing new semiconductor materials and devices, which is important for this role.
Quality Assurance Engineer
A Quality Assurance Engineer typically needs a Bachelor's degree in a related field. This course may be useful for someone aiming to work in this field, as it covers the fundamentals of electron and ion beam characterization of semiconductor materials and devices. This knowledge can help a Quality Assurance Engineer with ensuring the quality of semiconductor devices, which is important for this role.
Materials Engineer
A Materials Engineer typically needs a Master's degree in Materials Engineering or a related field. This course may be useful for someone aiming to work in this field, as it covers the fundamentals of electron and ion beam characterization of semiconductor materials and devices. This knowledge can help a Materials Engineer with designing and developing new materials, which is important for this role.
Forensic Scientist
A Forensic Scientist typically needs a Master's degree in a related field. This course may be useful for someone aiming to work in this field, as it covers the fundamentals of electron and ion beam characterization of materials. This knowledge can help a Forensic Scientist with analyzing materials to determine their composition and structure, which is important for this role.
Metallurgical Engineer
A Metallurgical Engineer typically needs a Bachelor's degree in Metallurgical Engineering or a related field. This course may be useful for someone aiming to work in this field, as it covers the fundamentals of electron and ion beam characterization of materials. This knowledge can help a Metallurgical Engineer with extracting and refining metals, which is important for this role.
Environmental Engineer
An Environmental Engineer typically needs a Bachelor's degree in Environmental Engineering or a related field. This course may be useful for someone aiming to work in this field, as it covers the fundamentals of electron and ion beam characterization of materials. This knowledge can help an Environmental Engineer with monitoring and protecting the environment, which is important for this role.
Chemical Engineer
A Chemical Engineer typically needs a Bachelor's degree in Chemical Engineering or a related field. This course may be useful for someone aiming to work in this field, as it covers the fundamentals of electron and ion beam characterization of materials. This knowledge can help a Chemical Engineer with designing and operating chemical processes, which is important for this role.
Mechanical Engineer
A Mechanical Engineer typically needs a Bachelor's degree in Mechanical Engineering or a related field. This course may be useful for someone aiming to work in this field, as it covers the fundamentals of electron and ion beam characterization of materials. This knowledge can help a Mechanical Engineer with designing and analyzing mechanical systems, which is important for this role.

Reading list

We've selected seven books that we think will supplement your learning. Use these to develop background knowledge, enrich your coursework, and gain a deeper understanding of the topics covered in Electron and Ion Beam Characterization.
Provides a comprehensive overview of the principles and techniques of Auger electron spectroscopy (AES). It valuable resource for anyone who wants to learn more about AES, from beginners to experienced users.
Provides a comprehensive overview of the principles and techniques of ion beam analysis. It valuable resource for anyone who wants to learn more about these techniques.
Provides a comprehensive overview of the principles and techniques of transmission electron microscopy (TEM). It valuable resource for anyone who wants to learn more about TEM, from beginners to experienced users.
Provides a comprehensive overview of the principles of solid state physics. It valuable resource for anyone who wants to learn more about this topic.

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