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Trevor Thornton

Optical and X-ray techniques are powerful ways to characterize semiconductor thin films. They can be used to measure film thickness, purity and crystalline quality, and for compositional analysis. Modern techniques are fast, turn-key, and generally non-destructive, allowing for rapid assessment of material properties. This course describes the fundamentals of optical and X-ray characterization and provides real-world examples of how they are used in semiconductor manufacturing.

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Syllabus

Course Introduction
Optical and X-ray techniques are powerful ways to characterize semiconductor thin films. They can be used to measure film thickness, purity and crystalline quality, and for compositional analysis. Modern techniques are fast, turn-key, and generally non-destructive, allowing for rapid assessment of material properties. This course describes the fundamentals of optical and X-ray characterization and provides real-world examples of how they are used in semiconductor manufacturing.
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Week 5.1: Reflectance Spectroscopy
This week introduces the concept of reflectance spectroscopy: a rapid, convenient, and non-destructive technique for measuring the thickness of transparent materials.
Week 5.2: Ellipsometry
This week, you will learn about ellipsometry, a powerful technique that allows us to extract the thickness and refractive index of transparent layers as thin as a few nanometers.
Week 5.3: Photoluminescence
This week, you will learn about photoluminescence.
Week 5.4: Electron Microprobe X-Ray Analysis
This week, you will learn about electron microprobe X-ray analysis.
Week 5.5: Course Wrap-up and Project
This week, you will complete a case study to assess your ability to analyze electron microprobe x-ray images to determine the constituent elements in a 40 nm MOSFET.

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Provides a foundational overview of optical and X-ray techniques for characterizing semiconductor thin films
Taught by industry experts Trevor Thornton, who has extensive experience in materials characterization
Suitable for engineers, scientists, and technicians working in the semiconductor industry or related fields
Course materials are up-to-date and relevant to current industry practices
Provides hands-on experience through real-world examples and case studies
Requires a strong background in physics, materials science, or a related field

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Activities

Be better prepared before your course. Deepen your understanding during and after it. Supplement your coursework and achieve mastery of the topics covered in Optical and X-Ray Characterization with these activities:
Review Fresnel Equations for Optical Characterization
Reviewing the Fresnel Equations will help you build a strong foundation for understanding the principles behind optical characterization techniques.
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  • Read through the relevant sections of your textbook or online resources.
  • Solve practice problems to test your understanding.
  • Attend a review session or workshop on Fresnel Equations.
  • Discuss the concepts with your classmates or a tutor.
X-ray Diffraction Tutorial
Completing an X-ray Diffraction tutorial will introduce you to the principles and techniques of X-ray characterization.
Browse courses on X-Ray Diffraction
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  • Find an online tutorial or video on X-ray diffraction.
  • Follow the steps in the tutorial to learn about the basic principles.
  • Apply the techniques to analyze a sample of your own.
  • Share your results with your classmates or instructor.
Ellipsometry Data Analysis Exercises
Working through Ellipsometry data analysis exercises will provide you with hands-on experience in analyzing real-world data.
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  • Obtain a dataset of ellipsometry measurements.
  • Use software or online tools to analyze the data.
  • Interpret the results and draw conclusions.
  • Compare your results with known values or literature data.
  • Discuss your findings with your classmates or instructor.
Four other activities
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Develop a Presentation on Semiconductor Characterization Techniques
Creating a presentation will help you synthesize and communicate your knowledge of semiconductor characterization techniques.
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  • Gather information from textbooks, research papers, and online resources.
  • Organize your material into a logical flow.
  • Create visual aids to support your presentation.
  • Practice your presentation in front of a mirror or with a friend.
Attend a Semiconductor Industry Conference
Attending a semiconductor industry conference will allow you to connect with potential employers, learn about industry trends, and gain insights from experts.
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  • Identify industry conferences that align with your interests.
  • Register for the conference and pay the registration fee.
  • Attend the conference and participate in networking events.
  • Follow up with the people you meet to stay connected.
Write a Case Study on a Semiconductor Device Failure
Writing a case study will help you apply your knowledge of semiconductor characterization techniques to real-world problems.
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  • Identify a semiconductor device failure case study.
  • Research the failure and gather data.
  • Analyze the data using semiconductor characterization techniques.
  • Develop a hypothesis about the cause of the failure.
  • Write a report summarizing your findings.
Contribute to an Open-Source Semiconductor Characterization Project
Contributing to an open-source project will allow you to learn from others, share your knowledge, and make a valuable contribution to the semiconductor industry.
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  • Find an open-source semiconductor characterization project that interests you.
  • Familiarize yourself with the project's codebase and documentation.
  • Identify an area where you can contribute.
  • Implement your changes and submit a pull request.
  • Work with the project maintainers to get your changes merged.

Career center

Learners who complete Optical and X-Ray Characterization will develop knowledge and skills that may be useful to these careers:
Materials Scientist
Materials Scientists develop new materials, and test, and characterize them to understand their properties. Optical and X-ray techniques are important for measuring the thickness, purity, and crystalline quality of semiconductor thin films used in various electronic devices. Taking this course can help you build a foundation in these techniques and gain hands-on experience in applying them to real-world problems in the semiconductor industry. Additionally, the course provides insights into the latest advancements in optical and X-ray characterization techniques, which can be valuable for Materials Scientists involved in research and development.
Optical Engineer
Optical Engineers design and develop optical systems and components. They use their knowledge of optics to create systems that can manipulate light for various applications, including imaging, communications, and sensing. This course provides a foundation in optical characterization techniques, which are essential for Optical Engineers to understand the performance of optical systems and components. The course also covers advanced topics such as ellipsometry and photoluminescence, which are used in the design and optimization of optical devices.
Semiconductor Device Engineer
Semiconductor Device Engineers design, develop, and test semiconductor devices, such as transistors and integrated circuits. They use their knowledge of semiconductor physics and materials science to create devices that meet specific performance requirements. This course provides a foundation in optical and X-ray characterization techniques, which are essential for Semiconductor Device Engineers to understand the properties of semiconductor materials and devices. The course also covers advanced topics such as electron microprobe X-ray analysis, which is used to analyze the composition and structure of semiconductor devices.
Process Engineer
Process Engineers develop and optimize manufacturing processes for various industries, including the semiconductor industry. They use their knowledge of materials science, chemistry, and physics to create processes that can produce high-quality products with high yields. This course provides a foundation in optical and X-ray characterization techniques, which are essential for Process Engineers to monitor and control manufacturing processes. The course also covers advanced topics such as electron microprobe X-ray analysis, which is used to analyze the composition and structure of materials used in manufacturing processes.
Analytical Chemist
Analytical Chemists use their knowledge of chemistry and instrumentation to analyze the composition and structure of materials. They use a variety of techniques, including optical and X-ray spectroscopy, to identify and quantify different elements and compounds. This course provides a foundation in optical and X-ray characterization techniques, which are essential for Analytical Chemists to perform accurate and reliable analyses. The course also covers advanced topics such as electron microprobe X-ray analysis, which is used to analyze the composition and structure of materials at the micro- and nano-scale.
Research Scientist
Research Scientists conduct research in various fields of science, including materials science, physics, and chemistry. They use their knowledge and expertise to develop new materials, devices, and technologies. This course provides a foundation in optical and X-ray characterization techniques, which are essential for Research Scientists to understand the properties of materials and devices. The course also covers advanced topics such as electron microprobe X-ray analysis, which is used to analyze the composition and structure of materials at the micro- and nano-scale.
Quality Control Technician
Quality Control Technicians ensure that products meet quality standards. They use a variety of techniques, including optical and X-ray inspection, to identify and eliminate defects. This course provides a foundation in optical and X-ray characterization techniques, which are essential for Quality Control Technicians to perform accurate and reliable inspections. The course also covers advanced topics such as electron microprobe X-ray analysis, which is used to analyze the composition and structure of materials at the micro- and nano-scale.
Manufacturing Engineer
Manufacturing Engineers design and optimize manufacturing processes for various industries, including the semiconductor industry. They use their knowledge of materials science, chemistry, and physics to create processes that can produce high-quality products with high yields. This course provides a foundation in optical and X-ray characterization techniques, which are essential for Manufacturing Engineers to monitor and control manufacturing processes. The course also covers advanced topics such as electron microprobe X-ray analysis, which is used to analyze the composition and structure of materials used in manufacturing processes.
Technical Writer
Technical Writers create and edit technical documentation, such as user manuals, technical reports, and white papers. They use their knowledge of technical subjects to explain complex concepts in a clear and concise manner. This course may be useful for Technical Writers who need to write about optical and X-ray characterization techniques. The course provides a foundation in these techniques and covers advanced topics such as electron microprobe X-ray analysis.
Science Teacher
Science Teachers teach science subjects, such as physics, chemistry, and biology, to students at various levels. They use their knowledge of science to create lesson plans and activities that help students learn about the world around them. This course may be useful for Science Teachers who teach about optics or materials science. The course provides a foundation in optical and X-ray characterization techniques and covers advanced topics such as electron microprobe X-ray analysis.
Patent Attorney
Patent Attorneys help clients obtain patents for their inventions. They use their knowledge of patent law and the patent process to prepare and file patent applications. This course may be useful for Patent Attorneys who need to understand the technical aspects of optical and X-ray characterization techniques. The course provides a foundation in these techniques and covers advanced topics such as electron microprobe X-ray analysis.
Sales Engineer
Sales Engineers sell technical products and services to businesses. They use their knowledge of technical products and the needs of businesses to develop and implement sales strategies. This course may be useful for Sales Engineers who sell optical or X-ray characterization equipment. The course provides a foundation in these techniques and covers advanced topics such as electron microprobe X-ray analysis.
Product Manager
Product Managers develop and manage products for businesses. They use their knowledge of marketing, engineering, and business to create products that meet the needs of customers. This course may be useful for Product Managers who work on optical or X-ray characterization equipment. The course provides a foundation in these techniques and covers advanced topics such as electron microprobe X-ray analysis.
Business Analyst
Business Analysts help businesses improve their operations by analyzing their processes and systems. They use their knowledge of business analysis techniques to identify areas for improvement and develop solutions. This course may be useful for Business Analysts who work on projects related to optical or X-ray characterization. The course provides a foundation in these techniques and covers advanced topics such as electron microprobe X-ray analysis.
Technical Support Engineer
Technical Support Engineers provide technical support to customers who use technical products and services. They use their knowledge of technical products and the needs of customers to resolve technical issues and provide guidance. This course may be useful for Technical Support Engineers who support optical or X-ray characterization equipment. The course provides a foundation in these techniques and covers advanced topics such as electron microprobe X-ray analysis.

Reading list

We've selected 11 books that we think will supplement your learning. Use these to develop background knowledge, enrich your coursework, and gain a deeper understanding of the topics covered in Optical and X-Ray Characterization.
Provides a comprehensive overview of the optical properties of solids, including the fundamental principles of light-matter interactions, the optical properties of semiconductors, and the optical properties of metals and insulators. It valuable reference for anyone interested in the optical properties of solids.
Provides a comprehensive overview of electron microprobe X-ray microanalysis, a powerful technique for analyzing the elemental composition of materials. It valuable resource for researchers and engineers working in the field of materials science.
Provides a comprehensive overview of the principles and applications of X-ray diffraction. It valuable reference for anyone interested in using X-ray diffraction to characterize materials.
Provides a comprehensive overview of X-ray diffraction, a powerful technique for analyzing the structure and properties of materials. It valuable resource for researchers and engineers working in the field of materials science.
Provides a comprehensive overview of the principles and applications of electron microprobe analysis and scanning electron microscopy in geology. It valuable reference for anyone interested in using these techniques to characterize geological materials.
Provides a comprehensive overview of X-ray metrology, a powerful technique for characterizing the dimensions and properties of semiconductor devices. It valuable resource for researchers and engineers working in the field of semiconductor manufacturing.
Provides a comprehensive overview of the principles and applications of scanning probe microscopy. It valuable reference for anyone interested in using this technique to characterize materials.
Provides a comprehensive overview of the principles of solid state physics. It valuable reference for anyone interested in learning about the fundamental properties of solids.
Provides a comprehensive overview of X-ray analysis of materials, a powerful technique for studying the structure and properties of materials. It valuable resource for researchers and engineers working in the field of materials science.
Provides a comprehensive overview of the principles of semiconductor physics and devices. It valuable reference for anyone interested in learning about the design and operation of semiconductor devices.
Provides a comprehensive overview of the physics of semiconductor devices. It valuable reference for anyone interested in learning about the fundamental principles of semiconductor devices.

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