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Optical and X-Ray Characterization

Trevor Thornton

Optical and X-ray techniques are powerful ways to characterize semiconductor thin films. They can be used to measure film thickness, purity and crystalline quality, and for compositional analysis. Modern techniques are fast, turn-key, and generally non-destructive, allowing for rapid assessment of material properties. This course describes the fundamentals of optical and X-ray characterization and provides real-world examples of how they are used in semiconductor manufacturing.

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What's inside

Syllabus

Course Introduction

Week 5.1: Reflectance Spectroscopy

This week introduces the concept of reflectance spectroscopy: a rapid, convenient, and non-destructive technique for measuring the thickness of transparent materials.

Week 5.2: Ellipsometry

This week, you will learn about ellipsometry, a powerful technique that allows us to extract the thickness and refractive index of transparent layers as thin as a few nanometers.

Week 5.3: Photoluminescence

This week, you will learn about photoluminescence.

Week 5.4: Electron Microprobe X-Ray Analysis

This week, you will learn about electron microprobe X-ray analysis.

Week 5.5: Course Wrap-up and Project

This week, you will complete a case study to assess your ability to analyze electron microprobe x-ray images to determine the constituent elements in a 40 nm MOSFET.

Good to know

Know what's good

, what to watch for

, and possible dealbreakers

Provides a foundational overview of optical and X-ray techniques for characterizing semiconductor thin films

Taught by industry experts Trevor Thornton, who has extensive experience in materials characterization

Suitable for engineers, scientists, and technicians working in the semiconductor industry or related fields

Course materials are up-to-date and relevant to current industry practices

Provides hands-on experience through real-world examples and case studies

Requires a strong background in physics, materials science, or a related field

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Activities

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Career center

Learners who complete Optical and X-Ray Characterization will develop knowledge and skills that may be useful to these careers:

Materials Scientist

Materials Scientists develop new materials, and test, and characterize them to understand their properties. Optical and X-ray techniques are important for measuring the thickness, purity, and crystalline quality of semiconductor thin films used in various electronic devices. Taking this course can help you build a foundation in these techniques and gain hands-on experience in applying them to real-world problems in the semiconductor industry. Additionally, the course provides insights into the latest advancements in optical and X-ray characterization techniques, which can be valuable for Materials Scientists involved in research and development.

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Optical Engineer

Optical Engineers design and develop optical systems and components. They use their knowledge of optics to create systems that can manipulate light for various applications, including imaging, communications, and sensing. This course provides a foundation in optical characterization techniques, which are essential for Optical Engineers to understand the performance of optical systems and components. The course also covers advanced topics such as ellipsometry and photoluminescence, which are used in the design and optimization of optical devices.

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Semiconductor Device Engineer

Semiconductor Device Engineers design, develop, and test semiconductor devices, such as transistors and integrated circuits. They use their knowledge of semiconductor physics and materials science to create devices that meet specific performance requirements. This course provides a foundation in optical and X-ray characterization techniques, which are essential for Semiconductor Device Engineers to understand the properties of semiconductor materials and devices. The course also covers advanced topics such as electron microprobe X-ray analysis, which is used to analyze the composition and structure of semiconductor devices.

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Process Engineer

Process Engineers develop and optimize manufacturing processes for various industries, including the semiconductor industry. They use their knowledge of materials science, chemistry, and physics to create processes that can produce high-quality products with high yields. This course provides a foundation in optical and X-ray characterization techniques, which are essential for Process Engineers to monitor and control manufacturing processes. The course also covers advanced topics such as electron microprobe X-ray analysis, which is used to analyze the composition and structure of materials used in manufacturing processes.

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Analytical Chemist

Analytical Chemists use their knowledge of chemistry and instrumentation to analyze the composition and structure of materials. They use a variety of techniques, including optical and X-ray spectroscopy, to identify and quantify different elements and compounds. This course provides a foundation in optical and X-ray characterization techniques, which are essential for Analytical Chemists to perform accurate and reliable analyses. The course also covers advanced topics such as electron microprobe X-ray analysis, which is used to analyze the composition and structure of materials at the micro- and nano-scale.

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Research Scientist

Research Scientists conduct research in various fields of science, including materials science, physics, and chemistry. They use their knowledge and expertise to develop new materials, devices, and technologies. This course provides a foundation in optical and X-ray characterization techniques, which are essential for Research Scientists to understand the properties of materials and devices. The course also covers advanced topics such as electron microprobe X-ray analysis, which is used to analyze the composition and structure of materials at the micro- and nano-scale.

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Quality Control Technician

Quality Control Technicians ensure that products meet quality standards. They use a variety of techniques, including optical and X-ray inspection, to identify and eliminate defects. This course provides a foundation in optical and X-ray characterization techniques, which are essential for Quality Control Technicians to perform accurate and reliable inspections. The course also covers advanced topics such as electron microprobe X-ray analysis, which is used to analyze the composition and structure of materials at the micro- and nano-scale.

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Manufacturing Engineer

Manufacturing Engineers design and optimize manufacturing processes for various industries, including the semiconductor industry. They use their knowledge of materials science, chemistry, and physics to create processes that can produce high-quality products with high yields. This course provides a foundation in optical and X-ray characterization techniques, which are essential for Manufacturing Engineers to monitor and control manufacturing processes. The course also covers advanced topics such as electron microprobe X-ray analysis, which is used to analyze the composition and structure of materials used in manufacturing processes.

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Technical Writer

Technical Writers create and edit technical documentation, such as user manuals, technical reports, and white papers. They use their knowledge of technical subjects to explain complex concepts in a clear and concise manner. This course may be useful for Technical Writers who need to write about optical and X-ray characterization techniques. The course provides a foundation in these techniques and covers advanced topics such as electron microprobe X-ray analysis.

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Science Teacher

Science Teachers teach science subjects, such as physics, chemistry, and biology, to students at various levels. They use their knowledge of science to create lesson plans and activities that help students learn about the world around them. This course may be useful for Science Teachers who teach about optics or materials science. The course provides a foundation in optical and X-ray characterization techniques and covers advanced topics such as electron microprobe X-ray analysis.

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Patent Attorney

Patent Attorneys help clients obtain patents for their inventions. They use their knowledge of patent law and the patent process to prepare and file patent applications. This course may be useful for Patent Attorneys who need to understand the technical aspects of optical and X-ray characterization techniques. The course provides a foundation in these techniques and covers advanced topics such as electron microprobe X-ray analysis.

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Sales Engineer

Sales Engineers sell technical products and services to businesses. They use their knowledge of technical products and the needs of businesses to develop and implement sales strategies. This course may be useful for Sales Engineers who sell optical or X-ray characterization equipment. The course provides a foundation in these techniques and covers advanced topics such as electron microprobe X-ray analysis.

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Product Manager

Product Managers develop and manage products for businesses. They use their knowledge of marketing, engineering, and business to create products that meet the needs of customers. This course may be useful for Product Managers who work on optical or X-ray characterization equipment. The course provides a foundation in these techniques and covers advanced topics such as electron microprobe X-ray analysis.

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Business Analyst

Business Analysts help businesses improve their operations by analyzing their processes and systems. They use their knowledge of business analysis techniques to identify areas for improvement and develop solutions. This course may be useful for Business Analysts who work on projects related to optical or X-ray characterization. The course provides a foundation in these techniques and covers advanced topics such as electron microprobe X-ray analysis.

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Technical Support Engineer

Technical Support Engineers provide technical support to customers who use technical products and services. They use their knowledge of technical products and the needs of customers to resolve technical issues and provide guidance. This course may be useful for Technical Support Engineers who support optical or X-ray characterization equipment. The course provides a foundation in these techniques and covers advanced topics such as electron microprobe X-ray analysis.

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Reading list

We've selected 11 books that we think will supplement your learning. Use these to develop background knowledge, enrich your coursework, and gain a deeper understanding of the topics covered in Optical and X-Ray Characterization.

A Student's Guide to Atomic Physics